发明名称 FUNCTIONAL LIQUID FEEDING MECHANISM, FUNCTIONAL LIQUID DROPLET DISCHARGING APPARATUS WITH THIS, MANUFACTURING METHOD FOR ELECTRO-OPTIC APPARATUS, ELECTRO-OPTIC APPARATUS AND ELECTRONIC EQUIPMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a functional liquid feeding mechanism capable of feeding a functional liquid to a functional liquid droplet discharging head without lowering the deaeration degree, and to provide a functional liquid droplet discharging apparatus with this, a manufacturing method for an electro-optic apparatus, an electro-optic apparatus and electronic equipment. <P>SOLUTION: The functional liquid feeding mechanism 4 is connected to the functional liquid droplet discharging head 11 for discharging functional liquid droplets, and feeds the functional liquid to the functional liquid droplet discharging head 11. The functional liquid feeding mechanism 4 is equipped with a functional liquid tank 51 of a pack form in which the functional liquid is vacuum packed, and a functional liquid feeding tube 52. The functional liquid feeding tube 52 has an upstream end part 58 connected to the functional liquid tank 51 and a downstream end part 59 connected to the functional liquid droplet discharging head 11. The deaerated functional liquid is stored in the functional liquid tank 51. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005161567(A) 申请公布日期 2005.06.23
申请号 JP20030400394 申请日期 2003.11.28
申请人 SEIKO EPSON CORP 发明人 MORI TOSHIMASA
分类号 B41J2/175;B05C5/00;B05C11/10;G02B5/20;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B41J2/175 主分类号 B41J2/175
代理机构 代理人
主权项
地址