| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus for perpendicularity which can measure stably perpendicularity of the horizontal direction against the vertical plane of measured object. SOLUTION: The measuring apparatus for perpendicularity is equipped with a sliding block 4 with a contact shoe 41 in contact with the measured plane 31, which is settled movably along an extended direction of the measured plane 31 of a straightedge 3, a reflecting mirror 5 installed on the sliding block 4 aiming a reflecting surface at the moving direction of the sliding block 4, an autocollimator measuring perpendicularity of the measured plane 31 based on reflected light from the reflecting mirror 5 that is emitted from moving direction of the sliding block 4 into the reflecting mirror 5, an energizing unit 7 energizing the sliding block 4 so as to force the contact shoe 41 of the sliding block 4 to come into contact with the measured plane 31 at a constant pressure, and a supporting unit 8 supporting the sliding block 4 to be movable along the extended direction of the measured plane 31, keeping the contact condition between the contact shoe 41 of the sliding block 41 and the measured plane 31. COPYRIGHT: (C)2005,JPO&NCIPI
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