发明名称 Contact probe storage FET sensor
摘要 A sensing device has a cantilever disposed with a medium which is movable relative to the cantilever, and a device associated with one of the cantilever and the medium, which is responsive to changes in electrical field between the medium and the cantilever caused by a distance between the medium and the cantilever changing.
申请公布号 US2005135224(A1) 申请公布日期 2005.06.23
申请号 US20030736692 申请日期 2003.12.17
申请人 HEWLETT-PACKARD DEVELOPMENT CO. 发明人 MEJIA ROBERT G.;VAN LYDEGRAF CURT N.
分类号 G01D5/18;G01D5/241;G01Q60/32;G01Q80/00;G11B9/00;(IPC1-7):G11B9/00 主分类号 G01D5/18
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