发明名称 |
Contact probe storage FET sensor |
摘要 |
A sensing device has a cantilever disposed with a medium which is movable relative to the cantilever, and a device associated with one of the cantilever and the medium, which is responsive to changes in electrical field between the medium and the cantilever caused by a distance between the medium and the cantilever changing.
|
申请公布号 |
US2005135224(A1) |
申请公布日期 |
2005.06.23 |
申请号 |
US20030736692 |
申请日期 |
2003.12.17 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT CO. |
发明人 |
MEJIA ROBERT G.;VAN LYDEGRAF CURT N. |
分类号 |
G01D5/18;G01D5/241;G01Q60/32;G01Q80/00;G11B9/00;(IPC1-7):G11B9/00 |
主分类号 |
G01D5/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|