| 发明名称 |
Replacement apparatus for an optical element |
| 摘要 |
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
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| 申请公布号 |
US2005134972(A1) |
申请公布日期 |
2005.06.23 |
| 申请号 |
US20040966388 |
申请日期 |
2004.10.15 |
| 申请人 |
KUGLER JENS;SORG FRANZ;WURMBRAND ANDREAS;SCHLETTERER THOMAS;ITTNER THOMAS |
发明人 |
KUGLER JENS;SORG FRANZ;WURMBRAND ANDREAS;SCHLETTERER THOMAS;ITTNER THOMAS |
| 分类号 |
G02B7/00;G02B7/02;G02B7/14;G02B13/14;G03F7/20;(IPC1-7):G21K7/00;G01N23/00 |
主分类号 |
G02B7/00 |
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