发明名称 |
METHOD AND APPARATUS FOR PATTERNING A WORKPIECE AND METHODS OF MANUFACTURING THE SAME |
摘要 |
<p>An apparatus for patterning a work piece including a source, and at least one reflective tilting surface adapted to induce a phase difference using at least one of a phase shifting plate and a difference in step height. A method corresponding to the apparatus for patterning a work piece. A method of manufacturing the apparatus for patterning a work piece and a Spatial Light Modulator, which may be included therein.</p> |
申请公布号 |
WO2005057291(A1) |
申请公布日期 |
2005.06.23 |
申请号 |
WO2004SE01848 |
申请日期 |
2004.12.10 |
申请人 |
MICRONIC LASER SYSTEMS AB |
发明人 |
LJUNGBLAD, ULRIC |
分类号 |
G02B5/18;G02B26/00;G02B26/08;G03F7/20;(IPC1-7):G03F7/20 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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