PIEZOELECTRIC DEVICE, LIQUID DISCHARGE HEAD, THEIR MANUFACTURING METHODS, AND THIN FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method by which a piezoelectric device can be manufactured efficiently with an piezoelectric film in which crystal orientations are arranged properly in a desired direction.

SOLUTION: After a biaxially oriented intermediate film 55 is formed on the surface of a substrate 52 by performing the ion beam-assisted laser ablation method in an arrangement in which the center axis of a projected ablation plume forms the angle of 55° with the direction of the normal line to the substrate, a lower electrode 542 is formed on the intermediate film 55 and the piezoelectric film 543 is formed on the lower electrode 542. Then an upper electrode 541 is formed on the piezoelectric film 543. The lower electrode 542 and piezoelectric film 543 are formed by epitaxial growth.

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