| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that can prevent lead contained in a piezoelectric film from spreading to a silicon oxide film via a zirconium oxide film at a portion where the zirconium oxide film and the piezoelectric film contact with each other when baking the piezoelectric film, without increasing the thickness of the zirconium oxide film, and to provide a liquid injection head using the actuator, and a liquid injector. <P>SOLUTION: The piezoelectric actuator is constituted such that: a piezoelectric element 300 having a lower electrode 33, the piezoelectric film 43 and an upper electrode 44 is formed on a vibrating plate 50; the piezoelectric film 43 has a close contact area that closely contacts with the vibrating plate 50; the vibrating plate 50 is formed with at least a first insulating film 51 and a second insulating film 52 that is formed at the piezoelectric element 300 side apart from the first insulating film 51 and has a spread prevention function; and the second insulating film 52 has an amorphous structure at is portion that corresponds to at least the close contact area. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
