| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of a flat sample capable of inspecting with high sensitivity a defect not only on the surface of the flat sample but also inside or on the rear. SOLUTION: A light source 2 having a transmissive wavelength through the sample 1 and a light intensity measuring device 4 are installed in the facing state to a face in the thickness direction of the sample 1 across the flat sample 1, and the intensity of transmitted light transmitted through the sample 1 is detected by the light intensity measuring device 4. The measuring device 4 is scanned in the scanning direction Y along the transmitted light outgoing surface of the sample 1 by a scanning means 41 for the light intensity measuring device 4. The transmitted light transmitted through the sample 1 is compared with the light intensity of transmitted light transmitted through a normal part, to thereby detect a defect 12 in the sample 1 from the scanning quantity of the measuring device 4 from the scanning base point where decline of the light intensity of the transmitted light is seen. COPYRIGHT: (C)2005,JPO&NCIPI
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