| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for forming a film by depositing aerosol, which is provided with a spray nozzle that inhibits clogging at the spray tip while securing a flow rate, and stably forms a film of adequate quality for a long period of time. SOLUTION: The spray nozzle 14 comprises in descending order to a downstream side; a gas-introducing section 41 for introducing an aerosol gas 33 consisting of aerosolized particulate materials and a carrier gas, and an assistant gas 34; a gas-merging section 42 for merging the gas 33 with the gas 34; and a spraying section 43 having a channel which is communicated with the gas-merging section 42 and is gradually narrowed toward a downstream side, and the spray tip 44. The assistant gas 34 pressurizes the aerosol gas 33 in the gas-merging section 42, thereby increases the flow rate of the aerosol gas 33, and flows along the inner walls 42a and 43a of the spray nozzle to prevent the particulate materials from depositing on the inner walls. COPYRIGHT: (C)2005,JPO&NCIPI
|
