| 摘要 |
PROBLEM TO BE SOLVED: To shorten time until a flow rate matches a designated flow rate by a simple control means. SOLUTION: A flow control valve has a controller which first data 92, second data 94, third data 96, and the value of a specified flow rate Q0 are inputted to and drives a motor, wherein the first data 92, the second data 94, and third data 96 indicate relationships according to the position X of a needle valve, concerning an expression, Q=C√(ΔP), wherein a ratio of a square root of a pressure differenceΔP to a flow rate Q is a proportional coefficient C in a prescribed state. The controller applies the position X detected by a Hall sensor and the pressure differenceΔP detected by a first pressure sensor and a second pressure sensor to at least two of the first data 92, the second data 94, and the third data 96, to obtain a target position X0 for achieving the designated flow rate Q0, and drives the motor so that the position X of the needle valve will reach the target position X0, thus performing the position control. COPYRIGHT: (C)2005,JPO&NCIPI
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