| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting apparatus which realizes the improvement of a mounting quality and the improvement of productivity by the reduction of a mounting time and which has a microvibration means of ultrasonic etc. by reducing flawing of a tool by chipping, and to provide a method for mounting. SOLUTION: The method and apparatus comprises a process of making a recognizing means recognize a first matter to be joined held by a head having the microvibration means and a second matter to be joined held by a stage, and a process of positioning the first matter to be joined and the second matter to be joined. After them, the method and apparatus comprises a joining process and a process of making a cleaning means to clean the holding surface of the first matter to be cleaned of the head having the microvibration means each time of joining the first matter to be joined and the second matter to be joined. COPYRIGHT: (C)2005,JPO&NCIPI
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