HEIGHT CALIBRATION OF SCANNING PROBE MICROSCOPE ACTUATORS

摘要

A mechanism for calibrating a scanning probe microscope is presented. The calibration mechanism operates to apply an input signal to an actuator to cause acceleration of the actuator and to measure a value indicative of deflection of a cantilever attached to the actuator, as a result of the actuator acceleration. The measured deflection value is used to determine a corresponding value of actuator displacement.