发明名称 SEMICONDUCTOR DEVICE HAVING THE STRUCTURE OF A PAD FOR PREVENTING AND BUFFERING THE STRESS OF A BARRIER NITRIDE
摘要 <p>A semiconductor device having a pad structure for preventing a stress of a silicon nitride film. The semiconductor device includes a semiconductor substrate, a lower structure formed on the semiconductor substrate, a first insulation film formed on the lower structure, a first metal layer coupled to the lower structure through a first metal contact in the first insulation film, a second metal layer formed on the first metal layer, and a plurality of dummy gates having a concentric square structure formed at the lower portion of the pad region on the second metal layer.</p>
申请公布号 KR20050062058(A) 申请公布日期 2005.06.23
申请号 KR20030093726 申请日期 2003.12.19
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, SUNG KEE
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L23/00;H01L23/485;H01L29/76;(IPC1-7):H01L21/60 主分类号 H01L23/52
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