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发明名称
Verfahren und Vorrichtung zum Handhaben von Platten
摘要
申请公布号
DE10161902(B4)
申请公布日期
2005.06.23
申请号
DE20011061902
申请日期
2001.12.17
申请人
INFINEON TECHNOLOGIES AG
发明人
MATSCHITSCH, MARTIN;BINDER, ALFRED;PUCHER, GERHARD;KROUPA, GERHARD;HIEBLER, GUNTER
分类号
H01L21/00;H01L21/68;H01L21/683;(IPC1-7):B65G47/91;B25J15/00;B81C3/00
主分类号
H01L21/00
代理机构
代理人
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