发明名称 ELECTRON BEAM GENERATOR AND LIGHT SAMPLER USING THE SAME GENERATOR
摘要 <p><P>PROBLEM TO BE SOLVED: To actualize an electron beam generator for performing accurate high-bandwidth sampling and a sampler using the same generator. <P>SOLUTION: This sampler is equipped with a device for generating an electron beam by irradiating a light signal to a negative-electrode cathode, a deflecting electrode for deflecting a generated electron beam, a sampling slit for partly transmitting the deflected electron beam, and an electric charge detection means for detecting the amount of electric charge (or integrated current) of the transmitted electron beam. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005164350(A) 申请公布日期 2005.06.23
申请号 JP20030402564 申请日期 2003.12.02
申请人 YOKOGAWA ELECTRIC CORP 发明人 TEZUKA KENTARO;KOBAYASHI SHINJI;YAGIHARA TAKESHI;OKA SADAJI;MIURA AKIRA
分类号 G01J1/02;G01J11/00;G01R1/07;G01R13/34;H01J1/30;H01J31/02;(IPC1-7):G01J1/02 主分类号 G01J1/02
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