| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mass flowmeter with a sensor tube simply built into a device, used for measurement even on highly corrosive fluid such as strong acid and strong alkali. <P>SOLUTION: This mass flowmeter 10 is structured so that the wall thickness d1 of a support part S is formed thick while keeping the wall thickness d2 thin of a measurement part M of a conduit 20. Since this can enhance the base material strength of the conduit 20 without damaging the measurement accuracy of the fluid F, the conduit 20 can be easily built into the device. Even a highly corrosive fluid F such as strong acid and strong alkali can be measured without fear of metal pollution since amorphous carbon having high heat conductivity and remarkably excelling in corrosion resistance is used as the material of the conduit 20. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
