| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detector that can solve the problem caused by the conventional position detector for wafer etc., that, since the conventional detector always constantly detects a integrating region in a non-measuring direction with respect to alignment marks AM having different lengths in the non-measuring direction, alignment mark signals become low-contract signals and accuracy deterioration occurs. SOLUTION: The position detector can highly accurately detect the position of a wafer etc., by making the integrating region in the non-measuring direction variable with respect to alignment marks AM having different lengths in the non-measuring direction and setting an appropriate integrating region having the appropriate shortest length in the non-measuring direction with respect to alignment marks AM having short lengths in the non-measuring direction and set in accordance with the purpose of the user. COPYRIGHT: (C)2005,JPO&NCIPI |
