| 摘要 |
PROBLEM TO BE SOLVED: To provide composite sealant applicable to a so-called "dovetail groove" having a vacuum sealing property, a plasma-proof property and a corrosive gas-proof property, having the vacuum sealing property which does not deteriorates by repeated use and generating no metal particles when being used and capable of being manufactured easily and inexpensively. SOLUTION: When the composite sealant 10 is pressure-welded, sealing property is imparted as a swelling part 28 of a first sealing part 30 of a first sealing member 20 is pressure-welded. At the same time, a second extending part 36 of a second sealing member 24 is pressed on an opening part 16 side of a sealing groove 12 via a first extending part 38 of the first sealing member 20 and an upper face 34a of a second sealing part 34 is pressure-welded and thus sealing property is imparted. COPYRIGHT: (C)2005,JPO&NCIPI
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