MANUFACTURING METHOD OF MAGNETIC HEAD, MAGNETIC HEAD, AND PATTERN FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To manufacture a magnetic sensor having an optical core width equal to or less than an exposure resolution limit with an excellent yield. SOLUTION: In a manufacturing method of a magnetic head composed of processes of forming a liftoff mask pattern on a magnetic resistance effect element in such a shape that the size of the liftoff pattern is larger at an upper part than at a lower part, forming a pair of electrodes on the magnetic resistance effect element with the liftoff mask pattern as a mask and removing the liftoff mask pattern, the process of forming the liftoff mask pattern is executed by a dry etching process. COPYRIGHT: (C)2005,JPO&NCIPI