发明名称 |
Electric component for detecting a liquid medium's ions has a sensor/actuator chip and a substrate for a layer for making things passive and a sensor/actuator structure with an active surface area |
摘要 |
<p>An actuator chip is surrounded by encapsulation (6) with an opening (7) that forms an access to first (5a) and second (5b) active surfaces. On a substrate (2) there is a layered stack with first (15) and second (17) strip conductor layers and first (14) and second (16) electric insulation layers.</p> |
申请公布号 |
DE10353121(A1) |
申请公布日期 |
2005.06.23 |
申请号 |
DE2003153121 |
申请日期 |
2003.11.12 |
申请人 |
MICRONAS GMBH |
发明人 |
LEHMANN, MIRKO;FREUND, INGO |
分类号 |
B81B7/02;G01N27/414;(IPC1-7):B81B7/02 |
主分类号 |
B81B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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