发明名称 Electric component for detecting a liquid medium's ions has a sensor/actuator chip and a substrate for a layer for making things passive and a sensor/actuator structure with an active surface area
摘要 <p>An actuator chip is surrounded by encapsulation (6) with an opening (7) that forms an access to first (5a) and second (5b) active surfaces. On a substrate (2) there is a layered stack with first (15) and second (17) strip conductor layers and first (14) and second (16) electric insulation layers.</p>
申请公布号 DE10353121(A1) 申请公布日期 2005.06.23
申请号 DE2003153121 申请日期 2003.11.12
申请人 MICRONAS GMBH 发明人 LEHMANN, MIRKO;FREUND, INGO
分类号 B81B7/02;G01N27/414;(IPC1-7):B81B7/02 主分类号 B81B7/02
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