CONVEYANCE EQUIPMENT FOR GLASS SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To convey a glass substrate while enabling proper storing of the glass substrate. SOLUTION: A conveyance apparatus 2 is arranged which conveys the glass substrate 1 in the state that conveyance is performed through a plurality of processing apparatuses 3 to the glass substrate 1. A transfer apparatus 4 which transfers the glass substrate 1 between the conveyance apparatus 2 and the processing apparatuses 3, and a storing shelf 5 which can keep the glass substrate 1 between the conveyance apparatus 2 and the processing apparatuses 3 are installed. The transfer apparatus 4 is constituted so as to be able to transfer the glass substrate 1 between the conveyance apparatus 2 and the storing shelf 5 and between the processing apparatuses 3 and the storing shelf 5. A plurality of the transfer apparatuses 4 and the storing shelves 5 are arranged corresponding to each of a plurality of the processing apparatuses 3. COPYRIGHT: (C)2005,JPO&NCIPI