CAPACITOR, ITS MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a capacitor that can reduce the size of a device provided with the capacitor by containing an insulating film having a high dielectric constant and does not contain Pb to become environmentally advantageous, and to provide a method by which the capacitor can be manufactured inexpensively and a semiconductor device provided with the capacitor. SOLUTION: In the capacitor 1, the insulating film 3 is held between first and second electrodes 2 and 4. The insulating film 3 contains SrTiO3as the main ingredient. In addition, at least either one of Si and Ge is added to the film 3. COPYRIGHT: (C)2005,JPO&NCIPI