| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection method and a defect inspection device of a laminate, capable of detecting a defect of the laminate in a nondestructive/noncontact manner, regardless of the material of the laminate, and utilizable, for example, for deterioration diagnosis of for a solid oxide type fuel cell or process inspection at manufacturing. SOLUTION: Thermal radiation distributions on the inspection body surface generated, when the inspection body 1 is heated from the back side and the surface side respectively by a lower infrared lamp 11; an upper infrared lamp 12 are detected by an infrared camera 20; and data of the change with passage of time of the thermal radiation distributions in the case of back side heating and surface side heating are compared by a data processing means 30, to thereby specify delamination P, based on the difference or the ratio between both data. COPYRIGHT: (C)2005,JPO&NCIPI
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