发明名称 Method and device for automated layer generation for double-gate FinFET designs
摘要 In a FinFET integrated circuit design, a combined cell structure contains two single cell structures at a first design hierarchy having fin shapes, the cell structures are placed adjacent to each other. The combined fin shapes of the two single cell structures at the first design hierarchy lead to a violation of a design rule related to fin topology in the overlapping region. A fin generation tool thus decides not to place the fins in the first design hierarchy. The fin generation is delegated another design hierarchy resulting in the generation of a single combined fin for both single cells.
申请公布号 US2005136582(A1) 申请公布日期 2005.06.23
申请号 US20040001297 申请日期 2004.12.01
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ALLER INGO;GERNHOEFER VEIT;KEINERT JOACHIM;LUDWIG THOMAS
分类号 G03F1/08;G06F17/50;H01L21/336;H01L21/82;H01L21/8234;H01L27/04;H01L27/08;H01L27/088;H01L29/786;(IPC1-7):H01L21/336;H01L21/00 主分类号 G03F1/08
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