Micro-oscillating element provided with torsion bar

摘要

A micro-oscillating element is provided with a frame ( 113 ) and a oscillating member ( 111 ) connected with the frame ( 113 ) via a connector ( 112 ). Each connector ( 112 ) includes two torsion bars ( 112 a), each torsion bar ( 112 a) being constructed so that the rigidity becomes relatively high toward the frame ( 113 ) and relatively low toward the oscillating member ( 111 ) by forming a plurality of holes ( 112 b).