发明名称 |
Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
摘要 |
A method for enhancing the optical performance of a reflective spatial light modulator by micro-planarizing surfaces within the SLM, such as the reflective surface of each pixel, by gas-cluster-ion-beam bombardment.
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申请公布号 |
US6908778(B2) |
申请公布日期 |
2005.06.21 |
申请号 |
US20030653549 |
申请日期 |
2003.09.02 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
STRUMPELL MARK H.;BAKER JAMES C.;GILLESPIE DAVID L. |
分类号 |
G02B26/08;(IPC1-7):H01L21/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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