发明名称 |
Method and apparatus for probe tip cleaning and shaping pad |
摘要 |
A method and apparatus is provided for cleaning and shaping a probe tip using a multi-layer adhesive and abrasive pad. The multi-layer adhesive and abrasive pad is constructed on the surface of a support structure, such as a silicon wafer, and is made of an adhesive in contact with abrasive particles. Adhesive is applied in layers with abrasive particles in-between each layer of adhesive. Abrasive particles may vary in size and material from layer to layer to achieve cleaning, shaping and polishing objectives.
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申请公布号 |
US6908364(B2) |
申请公布日期 |
2005.06.21 |
申请号 |
US20010921327 |
申请日期 |
2001.08.02 |
申请人 |
KULICKE & SOFFA INDUSTRIES, INC. |
发明人 |
BACK GERALD W.;DANG SON;TUNABOYLU BAHADIR |
分类号 |
B24B19/16;B24B29/08;B24D3/28;B24D13/14;B24D18/00;(IPC1-7):B24D11/00 |
主分类号 |
B24B19/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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