发明名称 Dual work function semiconductor structure with borderless contact and method of fabricating the same
摘要 A dual work function semiconductor structure with borderless contact and method of fabricating the same are presented. The structure may include a field effect transistor (FET) having a substantially cap-free gate and a conductive contact to a diffusion adjacent to the cap-free gate, wherein the conductive contact is borderless to the gate. Because the structure is a dual work function structure, the conductive contact is allowed to extend over the cap-free gate without being electrically connected thereto.
申请公布号 US6908815(B2) 申请公布日期 2005.06.21
申请号 US20030624781 申请日期 2003.07.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 YE QIUYI;TONTI WILLIAM R.;LI YUJUN
分类号 H01L21/28;H01L21/60;H01L21/768;H01L21/8234;H01L21/8238;H01L21/8242;H01L23/522;H01L27/088;H01L27/092;H01L27/108;H01L29/423;H01L29/43;H01L29/49;(IPC1-7):H01L21/336;H01L21/824 主分类号 H01L21/28
代理机构 代理人
主权项
地址
您可能感兴趣的专利