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发明名称
CMP EQUIPMENT AND ITS CONTROL METHOD
摘要
申请公布号
KR20050059642(A)
申请公布日期
2005.06.21
申请号
KR20030091345
申请日期
2003.12.15
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
KWON, KYOUNG MAN
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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