发明名称 Photometrically modulated delivery of reagents
摘要 A process system adapted for processing of or with a material therein. The process system includes: a sampling region for the material; an infrared photometric monitor constructed and arranged to transmit infrared radiation through the sampling region and to responsively generate an output signal correlative of the material in the sampling region, based on its interaction with the infrared radiation; and process control means arranged to receive the output of the infrared photometric monitor and to responsively control one or more process conditions in and/or affecting the process system.
申请公布号 US6909973(B2) 申请公布日期 2005.06.21
申请号 US20030641576 申请日期 2003.08.14
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 ARNO JOSE I.
分类号 G01N21/35;H01L21/66;(IPC1-7):H01L21/00 主分类号 G01N21/35
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