Magnetic transfer method and magnetic transfer device

摘要

In a magnetic transfer master carrier, as a substrate, one having a Young's modulus E (GPa) in the range of 85 to 250 is used. Magnetic transfer is performed under conditions in which 2<=alphaED³/{P(S 2 /S 1<=400 (where the constant alpha=7.37x10⁹) is satisfied, where d (m) is the thickness of the substrate from the bottom face of a recessed portion to the back face, S 1 (m²) is the total area of the cross sections of the projected portions which are parallel to the plane of the substrate at a height of 50% of Dmax from the bottom face of the recessed portion when the height from the bottom face of the recessed portion to the top face of a projected portion is denoted by Dmax, S 2 (m²) is the total area of the bottom faces of the recessed portions and the cross sections of the projected portions at the positions of the relevant bottom faces, and P (MPa) is the tight contact pressure between the master carrier and the slave medium at the time of magnetic transfer.