发明名称 |
Power monitoring unit, control method therefor, and exposure apparatus |
摘要 |
A power monitoring apparatus monitors the voltage fluctuation range of an AC power supply and the duration of voltage fluctuations within the voltage fluctuation range. The power monitoring apparatus looks up a power failure rank table for determining the power failure rank of the power supply on the basis of the voltage fluctuation range and the duration obtained as the monitoring result to determine the power failure rank of the power supply. The power monitoring apparatus sends a power failure signal indicating the power failure rank to a power supply destination of an AC power supply.
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申请公布号 |
US6909372(B2) |
申请公布日期 |
2005.06.21 |
申请号 |
US20030662471 |
申请日期 |
2003.09.16 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
IWANAGA TAKEHIKO;OUTSUKA KAZUHITO;SHIGARAKI TOSHIYUKI |
分类号 |
G03F7/20;G01R19/165;G01R31/40;H01L21/027;(IPC1-7):G08B17/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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