发明名称 |
Efficient method of dynamic formulation of chamber selections for multiple chamber tools |
摘要 |
A new method to manufacture a product is achieved. The method comprises providing a control system and a process tool. The process tool comprises multiple chambers. The process tool stores a plurality of recipes. The control system comprises a database. A set of chambers and a recipe name are selected based on the database. A recipe body is uploaded from the process tool to the control system based on the recipe name. The recipe body is modified to generate a runtime recipe body that specifies the set of chambers. The runtime recipe body is downloaded from the control system to the process tool. A product is processed in the process tool using the runtime recipe body.
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申请公布号 |
US6909934(B1) |
申请公布日期 |
2005.06.21 |
申请号 |
US20040751796 |
申请日期 |
2004.01.05 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHANG SEAN |
分类号 |
G05B19/418;G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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