| 发明名称 |
High carrier concentration p-type transparent conducting oxide films |
| 摘要 |
A p-type transparent conducting oxide film is provided which is consisting essentially of, the transparent conducting oxide and a molecular doping source, the oxide and doping source grown under conditions sufficient to deliver the doping source intact onto the oxide.
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| 申请公布号 |
US6908782(B2) |
申请公布日期 |
2005.06.21 |
| 申请号 |
US20030344446 |
申请日期 |
2003.02.11 |
| 申请人 |
MIDWEST RESEARCH INSTITTUE |
发明人 |
YAN YANFA;ZHANG SHENGBAI |
| 分类号 |
C01G9/02;C23C16/40;H01L21/00;H01L31/0224;H01L31/0296;H01L31/18;(IPC1-7):H01L21/00;H01L21/16;H01L29/12 |
主分类号 |
C01G9/02 |
| 代理机构 |
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代理人 |
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