| 发明名称 |
Apparatus having a static eliminator for manufacturing semiconductor devices and a method for eliminating a static electricity on a semiconductor wafer |
| 摘要 |
An ion generator generates ions above a semiconductor wafer and the ions are directed towards a surface of a semiconductor wafer. The ions combine with static charges on the semiconductor wafer to thereby discharge the surface of the semiconductor wafer.
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| 申请公布号 |
US6909587(B2) |
申请公布日期 |
2005.06.21 |
| 申请号 |
US20020147823 |
申请日期 |
2002.05.20 |
| 申请人 |
OKI ELECTRIC INDUSTRY CO., LTD. |
发明人 |
SONODA AKIHIRO |
| 分类号 |
H01L21/027;G03F7/16;G03F7/38;H01L21/00;H01L21/02;(IPC1-7):H05F3/00 |
主分类号 |
H01L21/027 |
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