发明名称 |
Method, device, computer-readable memory and computer program element for the computer-aided monitoring and controlling of a manufacturing process |
摘要 |
In the case of a method for the computer-aided monitoring and controlling of a manufacturing process of a plurality of physical objects, the physical objects are subjected to at least one manufacturing step and at least one of the processed physical objects is marked according to a deterministic selection criterion in such a way that it can be subjected to a test measurement. Furthermore, the manufacturing process is controlled on the basis of the result of the test measurement of the marked object.
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申请公布号 |
US6909933(B2) |
申请公布日期 |
2005.06.21 |
申请号 |
US20030706615 |
申请日期 |
2003.11.12 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
MAERITZ JOERN |
分类号 |
G05B19/418;H01L21/66;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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