发明名称 Method, device, computer-readable memory and computer program element for the computer-aided monitoring and controlling of a manufacturing process
摘要 In the case of a method for the computer-aided monitoring and controlling of a manufacturing process of a plurality of physical objects, the physical objects are subjected to at least one manufacturing step and at least one of the processed physical objects is marked according to a deterministic selection criterion in such a way that it can be subjected to a test measurement. Furthermore, the manufacturing process is controlled on the basis of the result of the test measurement of the marked object.
申请公布号 US6909933(B2) 申请公布日期 2005.06.21
申请号 US20030706615 申请日期 2003.11.12
申请人 INFINEON TECHNOLOGIES AG 发明人 MAERITZ JOERN
分类号 G05B19/418;H01L21/66;(IPC1-7):G06F19/00 主分类号 G05B19/418
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