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发明名称
METHOD FOR FABRICATION OF RECESSED GATE ELECTRODE
摘要
申请公布号
KR20050059488(A)
申请公布日期
2005.06.21
申请号
KR20030091113
申请日期
2003.12.15
申请人
AN, JEONG OH;HYNIX SEMICONDUCTOR INC.
发明人
AN, JEONG OH;JANG, SE AUG;CHO, HEUNG JAE;KIM, WOO JIN;PARK, HYUNG SOON;KIM, SEO MIN;JUNG, TAE WOO
分类号
H01L21/28;H01L21/336;H01L21/8242;H01L27/108;H01L29/423;H01L29/49;H01L29/78;(IPC1-7):H01L21/336
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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