发明名称 Composite material including copper and cuprous oxide and application thereof
摘要 A composite material is provided, which has a low thermal expansivity, a high thermal conductivity, and a good plastic workability, which composite material may be applied to semiconductor devices and many other uses. The composite material is composed of metal and inorganic particles having a smaller coefficient of thermal expansion than the metal. It is characterized in that the inorganic particles are dispersed in such a way that 95% or more of them (in terms of their area in cross-section) form aggregates of complex configuration joined together. The composite material contains 20-80 vol % of copper oxide, with the remainder being copper. It has a coefficient of thermal expansion of 5x10<SUP>-6 </SUP>to 14x10<SUP>-6</SUP>/° C. and thermal conductivity of 30-325 W/m.K in the range of room temperature to 300° C. It is suitable for the radiator plate of semiconductor devices and the dielectric plate of electrostatic attractors.
申请公布号 US6909185(B1) 申请公布日期 2005.06.21
申请号 US20010485227 申请日期 2001.12.18
申请人 HITACHI, LTD. 发明人 KONDO YASUO;KANEDA JUNYA;AONO TASUHISA;ABE TERUYOSHI;INAGAKI MASAHISA;SAITO RYUICHI;KOIKE YOSHIHIKO;ARAKAWA HIDEO
分类号 C22C1/05;B22F1/00;C22C1/10;C22C29/12;C22C32/00;H01L21/68;H01L23/373;(IPC1-7):H01L23/48;H01L23/52;H01L29/40 主分类号 C22C1/05
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