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发明名称
METHODS OF FORMING A SMALL CONTACT STRUCTURE IN A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICES FABRICATED USING THE SAME
摘要
申请公布号
KR20050059400(A)
申请公布日期
2005.06.20
申请号
KR20040056125
申请日期
2004.07.19
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOI, SUK HUN;SON, YOON HO
分类号
H01L21/28;H01L21/20;H01L21/44;H01L27/24;H01L45/00;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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