Acoustic resonator device incorporating an active element with a piezoelectric layer and a support with an acoustic insulation membrane for integrated circuits and Microsystems

摘要

An acoustic resonator device (1) comprises an active element (6) and a support. The support includes a membrane (5) and the active element provided with at least one piezoelectric layer (10) is surmounted by a multi-layer assembly (12) provided with at least three layers (13, 14, 15) of which at least one has a strong acoustic impedance and at least one a low acoustic impedance.