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发明名称
WAFER PEDESTAL FOR USE IN A VERTICAL TYPE FURNACE
摘要
申请公布号
KR20050058747(A)
申请公布日期
2005.06.17
申请号
KR20030090710
申请日期
2003.12.12
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
KIM, TAE HWAN;LEE, MU HYUNG
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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