| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of adjusting a mark position detecting apparatus which can reduce as a whole a TIS value in measuring a number of kinds of displacement detection marks having different sizes. SOLUTION: The position of each side of an adjusting mark 2 is measured, the displacement in an X direction and a Y direction of an external square and an internal square is measured respectively. First, this measurement is performed so that the center of the adjusting mark 2 is matched with the center of a visual field, and subsequently, measurement is performed so that the center of the mark 2 is spaced at a predetermined distance in the X direction and the Y direction, respectively. Then, the relation between the measurement positions and the TIS at that time is obtained from the data, and a tilt adjusting mechanism of a lens of an image forming optical system, a shift adjusting mechanism and a rotating mechanism around an Z axis are adjusted so that the TIS becomes small. COPYRIGHT: (C)2005,JPO&NCIPI |
