| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic thin film forming method and an apparatus whereby an organic material low in solubility is formed into an organic thin film, an organic material low in thermal stability is formed into an organic thin film, different organic materials are formed into an organic thin film by lamination or by separate applications, and an organic thin film with a desired thickness is obtained in a relatively short time. SOLUTION: The organic thin film forming method consists of successively performed steps comprising a step of mist formation wherein a organic thin film forming composition wherein an organic material is melted or dispersed into a solvent is sprayed from the nozzle of a mist forming means 3 into the carrier gas, a step of heating the thus-formed mist by a mist heating means 5, a step of forming a deposited film of the mist by projecting the heated mist from a mist projection nozzle 6 onto a substrate 8, and a step of drying the deposited film of the mist. COPYRIGHT: (C)2005,JPO&NCIPI
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