| 摘要 |
PROBLEM TO BE SOLVED: To provide an aberration detecting method enabling to detect coma aberration with high precision even if a measuring line is shifted against a lens or a group of lenses which generates spherical aberration. SOLUTION: The method comprises a process to obtain sharing interference images by interference of two diffraction lights having different orders for diffracting light, a process to change phases of the diffraction lights, a process to obtain phases of changes in light intensity at a plurality of measuring points on a plurality of lines, a process to obtain a secondary coefficient of a line written by fitting a relation between the phases of each line and detection points with a quadratic function, and a process to evaluate coma aberration in the X and Y directions. COPYRIGHT: (C)2005,JPO&NCIPI
|
