| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever for an SPM having a probe part with a sharpened tip part without affecting a lever part and enabling high resolution measurement at a high aspect ratio, and provide a manufacturing method therefor. SOLUTION: This microscope comprises a support part 1, the lever part 2 extended form the support part, and the probe part 3 formed in a free end side of the lever part. In the probe part, an angle change part of the first stage is formed in a joining part 5 with the lever part, an angle change part of the second stage is formed in an intermediate part 6 of the probe part, and the cantilever for the SPM is constituted to form a shape curved to a support part side in a midway to the tip part 4 of the probe part. COPYRIGHT: (C)2005,JPO&NCIPI
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