CMP for corrosion-free CoFe elements for magnetic heads

摘要

A method of manufacture of magnetic heads which include CoFe elements using CMP is presented. The method includes providing a slurry of Al₂O₃, adjusting the concentration of H₂O₂ in said slurry to within a range of 6-12% by volume and balancing mechanical polishing action. The balancing is done by adjusting the table speed of a mechanical polisher to within a range of 55-90 rpm, and adjusting polishing pressure to within a range of 5-7 psi. Also a magnetic head having elements made of CoFe material made by this method is disclosed.