发明名称 Fast swapping station for wafer transport
摘要 An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.
申请公布号 US2005129496(A1) 申请公布日期 2005.06.16
申请号 US20040810361 申请日期 2004.03.26
申请人 INTEGRATED DYNAMICS ENGINEERING GMBH 发明人 HEILAND PETER;TILLMANN RALF
分类号 B25J15/08;B65G49/07;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):B65F3/02 主分类号 B25J15/08
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