发明名称 Structure and method for reinforcing a bond pad on a chip
摘要 A structure for reinforcing or anchoring a bond pad on a chip. The structure includes a bonding pad provided in a dielectric layer, at least one conductive layer provided beneath and in electrical contact with the bonding pad, and at least one parallel-interconnect anchor structure provided in contact with the bonding pad and the conductive layer. The anchor structure or structures prevent the bonding pad from exerting excessive force against the dielectric layer and cracking the dielectric layer when the chip is subjected to physical testing. The bonding pad may have truncated or curved corners, for example.
申请公布号 US2005127529(A1) 申请公布日期 2005.06.16
申请号 US20030731983 申请日期 2003.12.10
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 HUANG TAI-CHUN;YAO CHIH-HSIANG
分类号 H01L21/44;H01L23/48;H01L23/485;H01L23/52;H01L29/40;(IPC1-7):H01L21/44 主分类号 H01L21/44
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