发明名称 METHOD FOR FABRICATION OF OPTICAL ELEMENT, AND OPTICAL ELEMENT HAVING THREE-DIMENSIONAL LAMINATED STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a method for production of an optical element in which even a high-function optical element can be produced with relative large area and the optical element having a three-dimensional laminated structure. SOLUTION: A method for production of an optical element includes a preparation step of preparing a first member having formed on the surface of a first substrate 101 a first layer 103 having at least one of natures of epitaxial growth and pores-making (micropores-making) and a second member having a porous layer for layer separation formed on a second substrate 104 and having formed thereon a second layer having at least one of natures of epitaxial growth and pores-making (micropores-making), a formation step of bonding the first layer 103 of the first member and the second layer of the second member together, then performing layer separation in the porous layer for layer separation in the second member, and separating the second substrate 104 and the second layer of the second member from each other to form a laminated structure on the first substrate 101, and a pattern forming step of forming a refraction index distribution pattern produced by a difference in refraction index in the plane of at least one of the first layer 103 and the second layer. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005157336(A) 申请公布日期 2005.06.16
申请号 JP20040317579 申请日期 2004.11.01
申请人 CANON INC 发明人 SUGITA MITSUO;YONEHARA TAKAO
分类号 G02B1/02;G02B6/12;G02B6/122;G02B6/13;G02B6/136;G02B6/14;H01S3/06;H01S3/08;H01S5/026;H01S5/04;H01S5/10;H01S5/183;H01S5/42;(IPC1-7):G02B1/02 主分类号 G02B1/02
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