| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate adjustment valve capable of finely adjusting a flow rate within a wide flow rate range, stably keeping flow rate adjusting characteristic for a long period and being miniaturized. SOLUTION: A valve seat face 2 is formed on a bottom face of a valve chest 3 formed at an upper part of a main body 1, a first flow channel 5 communicated with a communication port 4 formed on a center of the valve seat face 2, and a second flow channel 6 communicated with the valve chest 3 are respectively formed, and a diaphragm 10 is formed by integrally mounting a first valve element 11 capable of being inserted into the communication port 4 by the axial forward and backward movement of a stem and dropping and projecting from a liquid contact face, an annular projected second valve element 12 capable of being kept into contact with and separated from the valve seat face 2 and formed on a position radially separated from the first valve element 11, and a thin film part 13 formed continuously from the second valve element 1 in the radial direction. COPYRIGHT: (C)2005,JPO&NCIPI
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